{"id":21287,"date":"2021-12-08T14:12:31","date_gmt":"2021-12-08T14:12:31","guid":{"rendered":"http:\/\/www.uwb.edu\/?p=21287"},"modified":"2026-02-09T17:00:32","modified_gmt":"2026-02-10T01:00:32","slug":"cleanroom","status":"publish","type":"page","link":"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom","title":{"rendered":"Microfabrication Cleanroom"},"content":{"rendered":"\n<p>The University of Washington Bothell Microfabrication Cleanroom is a <strong>multidisciplinary research facility established in 2015<\/strong> to support student education and faculty research.<\/p>\n\n\n\n<p><strong>Cleanroom location at UW Bothell:<\/strong> Discovery Hall, room 262<\/p>\n\n\n\n<p>The facility is a class 10,000 cleanroom, featuring equipment and resources that bring together the multidisciplinary researchers at the UW Bothell in order to <strong>accelerate the pace of engineering\/science advancement, innovation, and excellence in education<\/strong>. The facility boasts modern microfabrication equipment and instruments used to fabricate not only CMOS (complementary metal oxide semiconductor) circuits, but also many electronic devices such as sensors and actuators.<\/p>\n\n\n\n<div class=\"wp-block-media-text alignwide has-media-on-the-right is-stacked-on-mobile\" style=\"grid-template-columns:auto 35%\"><div class=\"wp-block-media-text__content\">\n<p>The room is airlocked and researchers are in \u201cbunny suits\u201d (<a href=\"\/stem\/graduate\/ms-electrical-computer-engineering\/careers\/msteward\">MSEE Alumna Malia Steward<\/a> pictured suiting up to the right) to prevent contamination. A special yellow light illuminates the room to protect photo-sensitive material used to print a circuit on a silicon wafer. Bachelor\u2019s and master\u2019s degree students have a <strong>unique opportunity to prepare for industry and access a rare facility at UW Bothell<\/strong>, typically only available to Ph.D. students at a big research university given the huge investment.<\/p>\n<\/div><figure class=\"wp-block-media-text__media\"><img decoding=\"async\" src=\"https:\/\/www.uwb.edu\/stem\/wp-content\/uploads\/malia-20181114-uw-bothell-classes-4-0043.jpg\" alt=\"Malia Steward wearing a blue bunnysuit and white mask prepping to go into a cleanroom.\" class=\"wp-image-10000026781 size-full\" srcset=\"https:\/\/www.uwb.edu\/stem\/wp-content\/uploads\/malia-20181114-uw-bothell-classes-4-0043.jpg 770w, https:\/\/www.uwb.edu\/stem\/wp-content\/uploads\/malia-20181114-uw-bothell-classes-4-0043-300x200.jpg 300w, https:\/\/www.uwb.edu\/stem\/wp-content\/uploads\/malia-20181114-uw-bothell-classes-4-0043-768x512.jpg 768w, https:\/\/www.uwb.edu\/stem\/wp-content\/uploads\/malia-20181114-uw-bothell-classes-4-0043-600x400.jpg 600w\" sizes=\"(max-width: 770px) 100vw, 770px\" \/><\/figure><\/div>\n\n\n\n<div style=\"height:25px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<p>The B EE 546 CMOS II and B EE 551 Introduction of MEMS (Microelectromechanical systems) courses are developed and offered for graduate students in the Master of Science in Electrical &amp;Computer Engineering so that students can work to characterize CMOS logic gates and MEMS sensors.<\/p>\n\n\n\n<p><a href=\"\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom\/equipment\">View equipment in the cleanroom<\/a><\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img decoding=\"async\" src=\"https:\/\/www.uwb.edu\/stem\/wp-content\/uploads\/2023\/05\/gml-stem-student-cleanroom001-standard.jpg\" alt=\"\" class=\"wp-image-10000031401\" srcset=\"https:\/\/www.uwb.edu\/stem\/wp-content\/uploads\/2023\/05\/gml-stem-student-cleanroom001-standard.jpg 600w, https:\/\/www.uwb.edu\/stem\/wp-content\/uploads\/2023\/05\/gml-stem-student-cleanroom001-standard-300x200.jpg 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><figcaption class=\"wp-element-caption\">With more than 45 undergraduate and graduate degrees, options, certificates and concentrations, UW Bothell emphasizes close student-faculty interaction and critical thinking. UW Bothell is one of three University of Washington campuses, offering access to an excellent UW education to students from north King and Snohomish counties and the state of Washington.<\/figcaption><\/figure>\n","protected":false},"excerpt":{"rendered":"<p>The University of Washington Bothell Microfabrication Cleanroom is a multidisciplinary research facility established in 2015 to support student education and faculty research. Cleanroom location at UW Bothell: Discovery Hall, room 262 The facility is a class 10,000 cleanroom, featuring equipment and resources that bring together the multidisciplinary researchers at the UW Bothell in order to&#8230;<\/p>\n","protected":false},"author":6,"featured_media":0,"parent":21284,"menu_order":16,"comment_status":"open","ping_status":"open","template":"","meta":{"_acf_changed":false,"_is_archived":false,"_archived_contact_email":"","footnotes":""},"class_list":["post-21287","page","type-page","status-publish","hentry"],"acf":{"related_links":{"toggle_visibility":false,"link_1":"","link_2":"","link_3":"","link_4":"","link_5":""},"highlight_box":{"toggle_visibility":false,"title":"","content":"","button":"","button_style":"angled-purple-button","button_screen_reader_text":""},"contact_type_1":{"toggle_visibility":false,"contact_title":"School of Science, Technology, Engineering &amp; Mathematics","email":"stemgrad@uw.edu","phone":"425.352.5490","box":"","address_line_1":"","address_line_2":"","location":""},"contact_type_2":{"toggle_visibility":false,"contact_title":"","email":"","phone":"","box":"","address_line_1":"","address_line_2":"","location":""},"social_media":{"toggle_visibility":false,"facebook_url":"","instagram_url":"","linkedin_url":"","twitter_url":"","youtube_url":""},"blog_archive_sidebar_visibility":false},"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.0 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Microfabrication Cleanroom - School of Science, Technology, Engineering &amp; Mathematics<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Microfabrication Cleanroom - School of Science, Technology, Engineering &amp; Mathematics\" \/>\n<meta property=\"og:description\" content=\"The University of Washington Bothell Microfabrication Cleanroom is a multidisciplinary research facility established in 2015 to support student education and faculty research. Cleanroom location at UW Bothell: Discovery Hall, room 262 The facility is a class 10,000 cleanroom, featuring equipment and resources that bring together the multidisciplinary researchers at the UW Bothell in order to...\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom\" \/>\n<meta property=\"og:site_name\" content=\"School of Science, Technology, Engineering &amp; Mathematics\" \/>\n<meta property=\"article:modified_time\" content=\"2026-02-10T01:00:32+00:00\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data1\" content=\"2 minutes\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom\",\"url\":\"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom\",\"name\":\"Microfabrication Cleanroom - School of Science, Technology, Engineering &amp; Mathematics\",\"isPartOf\":{\"@id\":\"\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom#primaryimage\"},\"image\":{\"@id\":\"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.uwb.edu\/stem\/wp-content\/uploads\/malia-20181114-uw-bothell-classes-4-0043.jpg\",\"datePublished\":\"2021-12-08T14:12:31+00:00\",\"dateModified\":\"2026-02-10T01:00:32+00:00\",\"breadcrumb\":{\"@id\":\"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom#breadcrumb\"},\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom#primaryimage\",\"url\":\"https:\/\/www.uwb.edu\/stem\/wp-content\/uploads\/malia-20181114-uw-bothell-classes-4-0043.jpg\",\"contentUrl\":\"https:\/\/www.uwb.edu\/stem\/wp-content\/uploads\/malia-20181114-uw-bothell-classes-4-0043.jpg\"},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\/\/www.uwb.edu\/stem\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Graduate Programs\",\"item\":\"https:\/\/www.uwb.edu\/stem\/graduate\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"Master of Science in Electrical &amp; Computer Engineering\",\"item\":\"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\"},{\"@type\":\"ListItem\",\"position\":4,\"name\":\"Research\",\"item\":\"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\"},{\"@type\":\"ListItem\",\"position\":5,\"name\":\"Laboratories\",\"item\":\"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\"},{\"@type\":\"ListItem\",\"position\":6,\"name\":\"Microfabrication Cleanroom\"}]},{\"@type\":\"WebSite\",\"@id\":\"\/#website\",\"url\":\"\/\",\"name\":\"School of Science, Technology, Engineering &amp; Mathematics\",\"description\":\"Just another UW Bothell site\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"en-US\"}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"Microfabrication Cleanroom - School of Science, Technology, Engineering &amp; Mathematics","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom","og_locale":"en_US","og_type":"article","og_title":"Microfabrication Cleanroom - School of Science, Technology, Engineering &amp; Mathematics","og_description":"The University of Washington Bothell Microfabrication Cleanroom is a multidisciplinary research facility established in 2015 to support student education and faculty research. Cleanroom location at UW Bothell: Discovery Hall, room 262 The facility is a class 10,000 cleanroom, featuring equipment and resources that bring together the multidisciplinary researchers at the UW Bothell in order to...","og_url":"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom","og_site_name":"School of Science, Technology, Engineering &amp; Mathematics","article_modified_time":"2026-02-10T01:00:32+00:00","twitter_card":"summary_large_image","twitter_misc":{"Est. reading time":"2 minutes"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom","url":"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom","name":"Microfabrication Cleanroom - School of Science, Technology, Engineering &amp; Mathematics","isPartOf":{"@id":"\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom#primaryimage"},"image":{"@id":"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom#primaryimage"},"thumbnailUrl":"https:\/\/www.uwb.edu\/stem\/wp-content\/uploads\/malia-20181114-uw-bothell-classes-4-0043.jpg","datePublished":"2021-12-08T14:12:31+00:00","dateModified":"2026-02-10T01:00:32+00:00","breadcrumb":{"@id":"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom#breadcrumb"},"inLanguage":"en-US","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom"]}]},{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom#primaryimage","url":"https:\/\/www.uwb.edu\/stem\/wp-content\/uploads\/malia-20181114-uw-bothell-classes-4-0043.jpg","contentUrl":"https:\/\/www.uwb.edu\/stem\/wp-content\/uploads\/malia-20181114-uw-bothell-classes-4-0043.jpg"},{"@type":"BreadcrumbList","@id":"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories\/cleanroom#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/www.uwb.edu\/stem\/"},{"@type":"ListItem","position":2,"name":"Graduate Programs","item":"https:\/\/www.uwb.edu\/stem\/graduate"},{"@type":"ListItem","position":3,"name":"Master of Science in Electrical &amp; Computer Engineering","item":"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering"},{"@type":"ListItem","position":4,"name":"Research","item":"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research"},{"@type":"ListItem","position":5,"name":"Laboratories","item":"https:\/\/www.uwb.edu\/stem\/graduate\/ms-electrical-computer-engineering\/research\/laboratories"},{"@type":"ListItem","position":6,"name":"Microfabrication Cleanroom"}]},{"@type":"WebSite","@id":"\/#website","url":"\/","name":"School of Science, Technology, Engineering &amp; Mathematics","description":"Just another UW Bothell site","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"en-US"}]}},"_links":{"self":[{"href":"https:\/\/www.uwb.edu\/stem\/wp-json\/wp\/v2\/pages\/21287","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.uwb.edu\/stem\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.uwb.edu\/stem\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.uwb.edu\/stem\/wp-json\/wp\/v2\/users\/6"}],"replies":[{"embeddable":true,"href":"https:\/\/www.uwb.edu\/stem\/wp-json\/wp\/v2\/comments?post=21287"}],"version-history":[{"count":21,"href":"https:\/\/www.uwb.edu\/stem\/wp-json\/wp\/v2\/pages\/21287\/revisions"}],"predecessor-version":[{"id":36502,"href":"https:\/\/www.uwb.edu\/stem\/wp-json\/wp\/v2\/pages\/21287\/revisions\/36502"}],"up":[{"embeddable":true,"href":"https:\/\/www.uwb.edu\/stem\/wp-json\/wp\/v2\/pages\/21284"}],"wp:attachment":[{"href":"https:\/\/www.uwb.edu\/stem\/wp-json\/wp\/v2\/media?parent=21287"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}