Scanning Electron Microscope Equipment

Scanning Electron Microscope equipment

The Scanning Electron Microscope laboratory at UW Bothell includes an Energy-Dispersive Spectroscopy (EDS), Ion Sputter Coater, and Scanning Electron Microscope.

Energy-Dispersive Spectroscopy (EDS)

""The Energy-Dispersive Spectroscopy (EDS) (Oxford Aztec EDS system) is a combination of a Scanning Electron Microscope (SEM) and a Focused Ion Beam (FIB) system. The integration of both systems yields a powerful analytical tool for obtaining any data from any sample in three dimensions. Energy Dispersive Spectroscopy (EDS) Analysis provides qualitative elemental (Be to Cf) and chemical microanalysis. The system is equipped with the XMaxN 50mm2 EDS system to measure sub-surface (0.3-3um) with a detection limit of ~1 atom%. Schematic of system as it relates to the components of this system are pictured in Figure 1

Ion Sputter Coater

""The Ion Sputter Coater (Hitachi Ion Sputter MC1000) is a sample preparation instrument for use with a Scanning Electron Microscope (SEM). The MC1000 is designed to deposit a thin metal coating, such as platinum (Pt), gold (Au), platinum-palladium alloy (Pt-Pd) or gold-palladium alloy (Au-Pd), in order to make the surface of a sample electrically conductive and avoid charge build-up during observation in a SEM. The thickness of the metal deposition is variable from a few nanometers up to tens of nanometers by using the LCD touch screen control. Up to 5 processing conditions can be stored.

Scanning Electron Microscope

""The Scanning Electron Microscope (Hitachi SU5000 FE-SEM with Oxford EDS system) is a field emission variable pressure SEM. Ground-breaking computer-assisted technology from Hitachi, referred to as the EM Wizard, offers a new level of SEM operation and control. Expert or novice, the result is now the same: Highest quality nano-scale images at everyone's fingertips.

  • SE Detector resolution: 1.2 nm @30kV
  • BSE Resolution: 3.0 nm @ 15kV
  • Variable pressure range: 10 – 300 Pa
  • IR chamberscope and NaviCam
  • Oxford EDS system for elemental analysis